• Completely automated wafer handling
• Automated wafer centering and alignment using flats or notches
• High throughput
• Exceptionally stable and reproducible measurement results
• Wafer contact using Teflon-coated vacuum holds on the backside only
• Capable of measuring epitaxial film thickness from 300 nm to 7,500 nm
• Powerful FT-IR software toolkit for custom recipe generation
• SECS/GEM communications software
• Compliant with SEMI S2 and S8 safety and ergonomic standards
• Flexible measurement options from single point measurements to complete wafer mapping options
• Transmission and reflectance measurement capability to accommodate the widest range of materials and films
• Support of both ASTM and JEIDA standards
• Class 2 cleanroom ready

The ECO 2000 maintains the proven low cost of ownership and high reliability of our long-running series of ECO tools. Founded on our base of expertise in FT-IR technology, the ECO 2000 is also at the top of its class in performance. Thermo is committed to offering the most expertise and the best possible tools for FT-IR metrology. The ECO 2000 is another affirmation of this commitment.