全自动晶圆超声波缺陷检测系统

i-Wafer系列是一款高端仪器，操作人员可选择接收/拒绝标准，手动或自动检测晶圆。在KSI i-Wafer的探测下，晶圆中的孔隙、分层或者杂质都能被发现。尺寸在450mm的多种晶圆也能进行检测

新型KSI i-Wafer晶圆缺陷检测系统的主要特点：
- 扫描速度达2000mm/s
- 新型换能器
- 高质画面
- 同时使用1只、2只、4只换能器提高效能
- 能发现只有几微米的缺陷

German ksi-kassian i-wafer type

Automatic wafer ultrasonic defect detection system

The i-wafer series is a high-end device for which the operator has the option of receiving/rejecting the standard ａnd checking the Wafer manually or automatically.Under the detection of the KSI i-wafer, pores, layers or impurities in the Wafer can be found.A variety of wafers with a size of 450mm can also be tested