Swedish Mycronic mask metering system Prexision-MMS

Detailed introduction

Mask metering system

The main advantage

* better registration: 30%

* better mask sleeve closure to mask: 20%

* shorter turnaround time: 30%

· the latest innovative Prexision platform has excellent accuracy ａnd repeatability

· use our patented technology to improve registration measurement.

· because the results of the first measurement are accurate, this greatly saves you turnaround time.

· realize the full potential of our Prexision lithography machine.

Based on the most accurate Prexision platform, Prexision-MMS takes registration of large areas to a whole new level.Now you can prove just how good your mask quality is!

To take full advantage of its performance, the performance of your measurement system is also extremely important for fine-tuning the lithography machine so that your mask is depicted at the highest quality.

Prexision-MMS offers two models.The G8 can handle up to eight mask sizes for the glass dimensions of the display.For the G10, up to 11 generation display sizes can be handled.

Technical specification Prexision-MMS

Mask to mask sleeve closure 3 [nm] : 40

Registration 3 [nm] : 65

Key dimensional repeatability 3 [nm]: 50

Maximum size: G8