该套系统成功地继承了德国neaspec公司THz-neaSNOM的设计优势，采用保护的双光路设计，完全可以实现真空环境下太赫兹波段应用的样品测量。HV-THz-neaSNOM在实现30nm高空间分辨率的同时，由于采用0.1-3THz波段的时域太赫兹光源（THZ-TDS），也可以实现近场太赫兹成像和图谱的同时测量。这极大地满足真空环境中太赫兹近场光学研究的需求，可以减少大气中水对太赫兹波段的吸收影响，能更好地保持样品的洁净，为用户进一步集成真空设备提供了基础。

太赫兹波有极强的穿透性，对不透明物体能完成透视成像，用来做半导体材料、生物样品等的检测是其应用趋势。该套真空太赫兹波段近场光学显微系统（HV-THz-neaSNOM）的集成，将在生物应用、半导体元器件和相变材料载流子等研究及领域都有着广阔的应用前景，有望为广大太赫兹科研工作者提供更多实际研究工作中的便利和支持。

This system successfully inherits the design advantage of Germany＇s neaspec company thz-neasnom, ａnd adopts the patented dual optical path design, which can fully realize the sample measurement of terahertz band application in vacuum environment.Hv-thz-neasnom can realize high spatial resolution of 30nm ａnd simultaneous measurement of near-field terahertz imaging ａnd mapping due to the use of time-domain terahertz light source (thz-tds) at 0.1-3thz band.This greatly meets the demand of terahertz near-field optical research in vacuum environment, can reduce the absorption effect of water in atmosphere on terahertz band, can better keep the sample clean, ａnd provides a foundation for users to further integrate vacuum equipment.

Terahertz wave has a strong penetration, can complete the perspective imaging of opaque objects, used for the detection of semiconductor materials, biological samples is one of its application trends.The integration of the vacuum terahertz near-field optical microscopy system (hv-thz-neasnom) has broad application prospects in biological applications, semiconductor components ａnd phase change material carriers, ａnd is expected to provide more convenience ａnd support in practical research work for terahertz researchers.