• Based on the powerful Nicolet FT-IR Series spectrometer
• Easy-to-Use, push-button, software interface
• Wide variety of powerful quantitative algorithms supporting:
  ? linear regression
  ? classical least squares (CLS)
  ? partial least squares (PLS)
• Capable of measuring epitaxial film thickness from 300 nm to 7,500 nm
• On board self diagnostics
• Powerful FT-IR software toolkit for custom recipe development
• Extremely reliable
• Flexible measurement options from single point measurements to complete wafer mapping options
• Transmission and reflectance measurement capability to accommodate the widest range of materials and films
• Support of both ASTM and JEIDA standards for measurement of substitutional carbon and interstitial oxygen

The ECO/RS 300 maintains the low cost of ownership and high reliability of our long-running series of FT-IR products. Founded on our base of expertise in FT-IR technology, the ECO/RS 300 is also at the top of its class in performance. Thermo is committed to offering the most expertise and the best possible tools for FT-IR metrology. The ECO/RS 300 is another affirmation of this commitment.