Principle/原理:Grazing incidence Interferometer/斜入射干涉
Accuracy/精度:0.05μm/0.05微米 
Resolution/解析度:0.01μm/0.1微米
Part Size Configuration/尺寸范围配置:50mm-150mm & 100毫米-200毫米
Dynamic Range/动态测量范围:30μm/30微米
Data Point/数据点:Up to 250,000/达250,000以上
Measurement Time/测量时间:less than 5 seconds/小于五秒（量产设置下）
Throughput Time/量产时间:Clamped measurements 120 Wafer/hour
                        (每小时可测120片固定住的Wafer)
Measurement Datums/测量数据:Front referenced,Back referenced
                            Clamped and local site
Measurement Parameters/测量参数:Flatness/Bow/Parallelism
Data Analysis/数据分析:3D,color plot,slice plots,X,Y,circumferential
                      and radial,histogram plots,percent within plots 
Surfaces:Lapped,polished,etched