Applications:
1.Semiconductor Industry
2.High Purity Welding
3.Gas Analyzer Carts
4.Analytical Industry
5.Research and Development
6.Gas Bottle Filling Plants

Features:
1.Purifier / Particle Filter combination
2.Improves Equipment perfomance and process
economy
3.Sub-ppb removal of impurities from Inert
Gases, Nitrogen, Hydrogen, Acid Gases,
Oxygen and Hydride Speciality Gases
4.Integral 0.003 m Sintered Stainless Steel
Filter Media (9 log reduction)
5.316L stainless steel (<10 Ra) or 316L VAR
(<5 Ra) electropolished wetted surface finish
Optional Hastelloy C-22 filter media / housing
or Nickel filter media
6.In-Situ regeneration and bakeable to 450 C