Model | SNE-4500M |
Electron system | |
Resolution | 5nm (30kV, SE Image) 20nm ((30kV, BSE Image) |
Magnification | 30x ~ 100,000x |
Accelerating Voltage | 5~30kV (5 / 10 / 15 / 20 / 30 . 5 Steps) |
Signal Detection | Secondary Electron Image(SEI)· BSEI(Option) |
Observation mode | Standard mode |
Electron Gun | Pre-centered Tungsten Filament Cartridge |
Lens System | Two-stage Electromagnetic Condenser Lens One-stage Electromagnetic Objective Lens |
Stage system | |
Stage Traverse | 5-axis System · X, Y-axis : 40mm / R-axis : 360° T-axis : 0 to 45°, Z-axis : 0 to 35mm · Image Shift : ±100? |
Max. Sample Size | 80mm in Diameter x 35mm in Height |
Iamge system | |
Frame Memory | High Speed Mode (320×240) : 10 Frame / sec (Preview) Low Speed Mode (640×480) : 1 Frame / sec Photo Mode1 (1280×960) : 1 Frame / sec Photo Mode2 (2560×1920) : 1 Frame / sec Sampling Photo mode3 : 1 Frame / min |
Automation Function | Auto Focus, Auto Stigmator Auto Contrast & Brightness |
Image Format | BMP, JPG, PNG |
Data display | Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date and time, Micron marker |
Vacuum System | |
Vacuum mode | High Vacuum System |
Vacuum Pump | Rotary Pump + Turbo Molecular Pump [Full Automation System] |
Control system | |
OS | Microsoft Windows? 7 |
CPU | Intel? CoreTM i5 |
Memory / HDD | 2GB / 500GB |
Interface connector | USB 2.0 |
Dimensions and weight | |
Main Unit | 390(W)x330(D)x560(H)mm, 98kg 390(W)x310(D)x560(H)mm, 18kg (Controller) |
Installation rooom | Room temperature : 15℃~30℃/ Humidity : 70% or less / Electric power : Single phase 100~240 AC, 1KW, 50/60Hz |