| |
| Model | SNE-3200M |
| Electron system | |
| Resolution | 15nm (30kV, SE Image)
20nm ((30kV, BSE Image) |
| Magnification | 30x ~ 60,000x |
| Accelerating Voltage | 5~30kV (5 / 10 / 15 / 20 / 30 . 5 Steps) |
| Signal Detection | Secondary Electron Image(SEI)
Backscattered Electron Image(BSE) |
| Observation mode | Standard mode
Charge-up reduction mode |
| Electron Gun | Pre-centered Tungsten Filament Cartridge |
| Lens System | Two-stage Electromagnetic Condenser Lens
One-stage Electromagnetic Objective Lens |
| Stage system | |
| Stage Traverse | 3-axis System - X, Y-axis : 20mm / R-axis : 360°
· Image Shift : ±100㎛ |
| Max. Sample Size | 50mm in Diameter x 20mm in Height |
| Iamge system | |
| Frame Memory | High Speed Mode (320×240) : 10 Frame / sec (Preview)
Low Speed Mode (640×480) : 1 Frame / sec
Photo Mode1 (1280×960) : 1 Frame / sec
Photo Mode2 (2560×1920) : 1 Frame / sec
Sampling Photo mode3 : 1 Frame / min |
| Automation Function | Auto Focus, Auto Stigmator Auto Contrast & Brightness |
| Image Format | BMP, JPG, PNG |
| Data display | Magnification, Detector Type, Accelerating Voltage, Vacuum mode, Logo(text), Date ａnd time, Micron marker |
| Vacuum System | |
| Vacuum mode | High & Low Vacuum system |
| Vacuum Pump | Rotary Pump + Turbo Molecular Pump [Full Automation System] |
| Control system | |
| OS | Microsoft Windows® 7 |
| CPU | Intel® CoreTM i5 |
| Memory / HDD | 2GB / 500GB |
| Interface connector | USB 2.0 |
| Dimensions ａnd weight | |
| Main Unit | 390(W)x640(D)x560(H)mm, 90kg |
| Installation rooom | Room temperature : 15℃~30℃/ Humidity : 70% or less / Electric power : Single phase 100~240 AC, 1KW, 50/60Hz |
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