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直流/射频电源
世华尖锋(APM)公司提供功率从100W到40KW的直流(DC)和射频(RF)电源. 我们提供的直流电源集合率的整流技术, 功率/电流/电压可调节,抑弧功能等. 我们提供的Seren射频电源, 可以实现的可编程控制(包括工艺存储,功率曲线等),的减少了靶材的热应力. 无论是DC还是RF电源,都可以配合多路转换装置使用,实现一个电源给多个靶位分别供电或者RF/DC任意切换.
Senren特有的100W和300W小功率RF电源,既能满足使用要求,又极大的降低了成本.这种小功率的RF电源,也非常适合做样片的偏压电源.具体参数如下:
AJA 100&300 Watt RF Generator with manual matching and integrated 3-way swithchbox
SPECIFICATIONS | A100RF/A100MM | A300RF/A300MM |
Output Power | 100W | 300W |
Frequency | 13.56MHz | |
Forward Power Metering | +/-1% full scale, +/-1% reading | |
Output Power Stability | +/-0.5% long term, +/-1% Watt | |
Harmonics | -55dBc | |
Input Power | 190-250 VAC,50/60 Hz | |
Output Connectors | (3) type “N” female | |
Interface Connectors | Serial: DB-9 Female, Analog: DB-25 Female | |
Pulsing | 10kHz, 50 micro sec/min. pulse | |
Cooling | Forced Air, 110 cfm (52 l/s) | |
Dimensions (generator+matchbox) | (2) half racks, 5.24”high, 19”deep, can be separate or together | |
Weight | 43 lbs | |
