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名称：WS-1000湿法刻蚀设备Wet Station
产地：美国
品牌：Laurell
湿法设备Wet Station
湿法刻蚀设备特征：
l All white polypropylene construction
l Any Laurell Spin Processor(s) installed
l Easy-access Nitrogen&DI Spray guns
l Need a smaller size?-see our MINI
l 全白色聚丙烯构造
l 可内置任何Laurell公司的匀胶机（即旋涂仪）
l 排放简便的入氮口和DI喷头
l 如果需要更小尺寸——有微型湿法设备Wet Station供选择
GENERAL INFORMATION
湿法刻蚀设备一般信息
The Laurell WS-1000 Series Spin-Process Stations allow a fully configuredtested module to be constructedshipped complete-requiring only the minimum of installation time. Easy to loadoperate-everything is in convenient reach to the operator.
Laurell公司的WS-1000系列旋转处理湿法设备Wet Station可以被配置成测试模块构造，安装简便，易于拆卸，更便于操作者控制。
Typical processes for the WS-1000 include, but are not limited to:
Typical processes for the WS-1000 include, but are not limited to:
典型的WS-1000湿法刻蚀设备Wet Station处理过程包括（但不限于）：
l Coating
l Etching
l Developing-Aqueous/Solvent
l Cleaning-Aqueous/Solvent
l Yes, Sulfuric/Peroxide(insitu mixing)
l Yes, HBr
l Temperature-controlled Developing
l Rinsing/Drying
l 涂敷
l 蚀刻
l 开发-水/溶剂
l 清洗-水/溶剂
l 确认，硫酸/双氧水（原样混合）
l 确认，HBr
l 温控开发
l 冲洗/烘干
Wet Station Features:
湿法刻蚀设备Wet Station特点：
All polypropylene construction(Self-extinguishing available-see below)
Accommodates the installation of any Laurell spin processor
Perforated wet-deck(easily removable)
Wet plenum
Exhaust Plenum with gauge
Isolated component/drawer below for heaters, pumps, vessels…
全聚丙烯构造（见下文的自灭火功能）
可兼容安装任何Laurell 旋涂机
有排孔的湿隔层（易于拆除）
潮湿的空间
标准规格的排气空间
被热水器，水泵，容器等隔离的组件/容器
Wet StationOptions:
湿法刻蚀设备Wet Station选项：
l Processor exhaust interlockcontrol(standard on some models)
l Heating&insitu material stirring
l Rinse to resistivity
l Drain diverter(s)
l Vacuum loading wand
l Wafer cassette stand
l Leak detection
l Light towers
l 排气联锁控制处理器（一些型号是标准的）
l 加热和原材料搅拌
l 抵抗力冲洗
l 排水转向装置
l 真空负荷棒
l 晶片盒座
l 检漏
l 轻塔
Advanced materials available if required
湿法刻蚀设备Wet Station可以根据要求采用更高级的材料
Better
更好的湿法设备Wet Station
WS-1000-CP5-meets SEMI S93 specification for fire safety in clean room applications. CP5 meets UL94 V-O fire classification. It has an excellent babance of physical properties, chemical resistancefire safety.
WS-1000-CP5 湿法设备Wet Station符合SEMI S93标准应用在消防安全和洁净空间等领域。CP5符合UL94 V-O 火灾分类标准。它具有优良的平衡的物理性能，耐化学药品性和耐火性。
Best
*佳的湿法设备Wet Station
WS-1000-CP7-D-a flame retardant polypropylene formulation who’s flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristicsburn-through. This advanced material also meets or exceeds test standards for low smoke generationminimal toxic by-products.
WS-1000-CP7-D湿法设备Wet Station的材料阻燃特性符合*严格的FMRC 4910测试标准，满足多方面条件下的难燃性，自熄特点和彻底燃烧。这种的材料也达到或超过产生低烟和*小毒副产品的检测标准。
