FT-IR度量工具

• Fully automated handling of wafers up to 300 mm
• The only FT-IR metrology tool to utilize Asyst Technologies" new state-of-the-art EFEM, rated ISO class 1 for particle contamination
• Two in-line load ports
• Precision edge grip stage provides exceptionally stable and reproducible measurement results with the absolute minimum wafer contamination
• Powerful FT-IR software toolkit for custom recipe generation
• SECS/GEM/HSMS communications software
• Capable of measuring epitaxial film thickness from 300nm to 7,500 nm
• Flexible measurement options from single point measurements to complete wafer mapping options
• Measures up to 140 wafers per hour
• Transmission and reflectance measurement capability to accommodate the widest range of materials and films
• Completely integrated controller with optional second control station in rear of tool to accommodate bulkhead FAB architectures
• Support of both ASTM and JEIDA standards

The ECO 3500 improves upon the proven, low cost of ownership and high reliability of our long-running series of ECO tools. Founded on our base of expertise in FT-IR technology, the ECO 3500 is also at the top of its class in performance. Thermo is committed to offering the most expertise, worldwide support and the best possible tools for FT-IR metrology. The ECO 3500 is another affirmation of this commitment.