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纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||||||
99.9999 | N2 | H2 | O2+Ar | CO | CO2 | CH4 | H2O | C2H6+C3H8 | SiH3Cl | 电阻率 |
1.00 | 20.0 | 0.05 | 0.05 | 0.05 | 0.05 | 0.50 | 0.10 | 0.15 | >1000Ωcm | |
99.999 | N2 | He | H2 | CO | CO2 | CH4 | H2O | O2+Ar | 电阻率 | |
5 | 5 | 100 | 0.50 | 0.50 | 0.50 | 2 | 1 | >1000Ωcm |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||||
99.9999 | N2 | O2 | CO | CO2 | AsH3 | H2O | 总烃 |
0.3 | 0.1 | 0.05 | 0.1 | 0.2 | 0.1 | 0.1 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||||||||
99.9999 | Ar | N2 | O2 | CO | CO2 | CH4 | H2O | GeH4 | C2H6 | C3H8 | PH3 | SiH4 |
0.1 | 0.1 | 0.1 | 0.05 | 0.1 | 0.1 | 0.05 | 0.1 | 0.1 | 0.1 | 0.2 | 0.1 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||
99.99 | N2 | O2 | THC | H2O |
5.0 | 1.0 | 1.0 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.995 | O2 | CO2 | H2O | CH4 | CH3Cl |
3.0 | 3.0 | 3.0 | 5.0 | 10.0 | |
99.95 | 5.0 | 10.0 | 5.0 | 100.0 | 100.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||
99.99 | O2+Ar | CO2 | H2O | CH4 | CO | H2 |
100.0 | 100.0 | 200.0 | 50.0 | 50.0 | 100.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.9 | N2 | H2 | O2 | CO2 | H2O |
150.0 | 50.0 | 50.0 | 50.0 | 10.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||||
99.995 | O2+Ar | N2 | CO2 | CH4 | H2O | NO | NO2 | NH3 |
0.5 | 2.0 | 1.0 | 0.5 | 1.0 | 1.0 | 1.0 | 1.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.9 | N2 | N2O | NO2 | CO2 | THC |
500.0 | 100.0 | 50.0 | 100.0 | 10.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||
99.9 | 残渣 | 酸度 | H2O |
40.0 | 20.0 | 40.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||
99.98 | 残渣 | 酸度 | H2O |
40.0 | 20.0 | 40.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||
99.9 | Air | THC | CO2 | H2O |
50.0 | 10.0 | 30.0 | 10.0 |
分子式 | 名称 | 纯度(≥) | 分子式 | 名称 | 纯度(≥) |
C2H2 | 乙炔 | 99.90% | C4H8 | 异丁烯 | 99.5-99.9% |
CH4 | 甲烷 | 99.9-99.995% | C4H8 | 顺丁烯 | 99-99.9% |
C2H6 | 乙烷 | 99.90% | C4H8 | 反丁烯 | 99-99.9% |
C3H4 | 甲基乙炔 | 99.00% | C5H12 | 正戊烷 | 99.50% |
C4H6 | 乙基乙炔 | 99.00% | C5H12 | 异戊烷 | 99.50% |
C2H4 | 乙烯 | 99.90% | C4H6 | 1,2-丁二烯 | 99.50% |
C4H10 | 异丁烷 | 99.50% | C4H6 | 1,3-丁二烯 | 99.90% |
C3H8 | 丙烷 | 99-99.9% | C5H10 | 正戊烯 | 99.50% |
C3H6 | 环丙烷 | 99.50% | C6H12 | 己烯 | 99.50% |
C3H6 | 丙烯 | 99.90% | C6H12 | 环己烷 | 99.50% |
C3H4 | 丙二烯 | 99.00% | C2H6O | 甲醚 | 99.90% |
C4H8 | 正丁烯 | 99.90% | C2H4O | 环氧乙烷 | 99.90% |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,% ) | ||
99.0 | O2+N2 | CF4 | HF |
0.45 | 0.05 | 0.50 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||
99.9 | H2O | Cl2 | H2SiF6 | SO4-- | HPO4-- | Metals |
25.0 | 5.0 | 100.0 | 5.0 | 12.2 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||||||
99.9 | N2 | N2O | O2+Ar | CO | CO2 | H2O | CF4 | SF6 | 总F |
50.0 | 10.0 | 50.0 | 10.0 | 10.0 | 1.0 | 700 | 50.0 | 0.3 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||
99.9 | O2 | N2 | HF |
20.0 | 75.0 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||||
99.99 | N2 | O2 | CO | CO2 | SO2 | SiF4 | MS |
15.0 | 5.0 | 2.0 | 20.0 | 20.0 | 20.0 | 8.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||
99.995 | Air | H2O | CO2 | CH4 | HF | 其它碳氟 |
15.0 | 4.0 | 2.0 | 1.0 | 1.0 | 10.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.999 | N2 | O2 | CO | H2O | 其它碳氟 |
2.0 | 1.0 | 1.0 | 1.0 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||||||
99.99 | N2 | O2 | CO | CO2 | CH4 | HF | PF5 | BF6 |
3.0 | 1.0 | 0.5 | 1.0 | 10.0 | 50.0 | 0.5 | 1.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.99 | N2 | H2 | O2 | H2O | 其它 |
50.0 | 5.0 | 20.0 | 5.0 | 30.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.9 | N2 | H2 | O2 | H2O | 其它 |
50.0 | 10.0 | 20.0 | 3.0 | 30.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||
99.99 | N2 | O2 | H2O | 其它 |
0.1 | 0.1 | 10.0 | 0.1 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||
99.99 | N2 | O2 | H2O | 其它 |
0.1 | 0.1 | 10.0 | 0.1 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.99 | N2 | O2 | CO | CO2 | H2O |
60.0 | 15.0 | 2.0 | 2.0 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | ||||
99.99 | N2 | H2 | H2O | CF4 | 其它 |
24.0 | 6.0 | 5.0 | 20.0 | 5.0 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | 杂质含量:Impurities ( ≤,ppb ) | |||||||||||
99.98 | N2 | CO+CO2 | CF4 | HF | SiF4 | SF6 | O2+Ar | Fe | Cr | Na | K | U | Th |
10 | 1.0 | 1.0 | 10 | 0.5 | 0.5 | 1 | 10 | 10 | 10 | 20 | 0.05 | 0.1 |
纯度Purity≥,% | 杂质含量:Impurities ( ≤,ppm ) | |||
99.7 | N2 | H2 | H2O | 其它 |
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