快速热退火炉

规格：

1) Temperature : Max. 1500℃ in vacuum chamber 2) Max 400℃ at the air. 3) Pressure : torr(Ultimate Pressure within minutes by small chamber) 4) PG / PBN Spec : 1300 watt, 220V, 15-25 Ohm, 15 A(max.)

1) PG / PBN Heating Chuck (1 inch, ,2 inch, 3 inch : Circled feature)
2) Temp, control part
3) Gas injection part

Ecopia’s Heat-Treatment System is new concept of adopted PG/PBN electrostatic heater system that combining small-sized ceramic heater, electricity conduction ceramics PG(Pyrolytic Graphite) and electricity insulation ceramics PBN (Pyrolytic Boron Nitride). It is a convenient and useful system that can perform high efficiency,small capacity and high speed responsiveness of small RTA(Rapid Thermal Anneal) by short time of temp rising(1000℃/10sec) , providing uniform temp on surface.