电子工业用高纯气体（1）

气体种类规格杂质含量(ppm)
NH3〉99.999%CH4〈0.5; H2〈0.5; N2〈3.0；CO〈1.0; H2O〈2.0; O2+Ar〈1.0
〉99.99%CH4〈10.0; N2〈40.0； H2O〈33.0; O2+Ar〈10.0
99.9995%ScottGas: SEMI C3.12-94. N2〈1ppm; O2〈1ppm; TCH〈1ppm; CO〈1ppm; H2O〈1ppm;H2〈1ppm
Ar99.9999%ScottGas: SEMI C3.14-94. N2〈0.5ppm; O2〈0.2ppm; TCH〈0.1ppm; CO+CO2〈0.2ppm; H2O〈0.5ppm;H2〈0.5ppm
99.9995%ScottGas: SEMI C3.14-94. N2〈4ppm; O2〈1ppm; TCH〈0.2ppm; CO+CO2〈0.2ppm; H2O〈1.0ppm;H2〈1ppm
9.999%ScottGas: SEMI C3.14-94. N2〈8ppm; O2〈1ppm; TCH〈0.5ppm; CO+CO2〈0.5ppm; H2O〈1ppm;H2〈1ppm
〉99.997%THC≤0.1; CO2≤0.1; H2O≤0.2; CO≤0.1; H2≤0.1; N2≤1.0;O2≤1.0
AsH3〉99.999%CH4〈1.0; CO〈0.5; N2〈0.1; C2H6〈1.0; CO2〈1.0; O2〈1.0;C3H8〈1.0; H2O〈0.5; PH3〈2.0
BCl399.999%HC4〈0.5; N2〈4.0; Fe〈0.3; Cl2〈0.5; O2〈2.0; K〈0.05;CO〈0.5; Al〈0.05; Na〈0.1; COCl2〈0.5; Ca〈0.02; Ni〈0.01;HCl〈2.0; Cu〈0.001; Si〈0.5
99.9%Cl2〈100; COCl2〈900; Si〈5