电子工业用高纯气体

气体种类规格杂质含量(ppm)
C2F699.999%ScottGas: N2〈4ppm; O2〈1ppm; THC〈1ppm; CO〈1ppm; CO2〈1ppm; H2O〈1ppm; Acidity〈0.1ppmw
99.99%ScottGas: N2〈40ppm; O2〈10ppm; THC〈5ppm; CO〈5ppm; CO2〈5ppm; H2O〈10ppm; 酸性物〈0.1ppmw硅氧烷〈5ppm; 氯硅烷〈0.2ppm;
99.96%CO〈5.0; H2O〈5.0; N2〈250; CO2〈5.0; HCl〈0.1; O2〈100;
C2HF599.99%ScottGas: N2〈65ppm; O2〈15ppm;H2O〈10ppm; 酸性物〈0.1ppmw
C2H2F499.95%ScottGas: N2〈10ppm; O2〈10ppm; N2〈40ppm; 酸性物〈0.1ppmw
C3F899.96%ScottGas: H2O〈75ppm; CO〈20ppm; CO2〈17ppm; N2+O2〈30ppm; 酸性物〈0.1ppmw
C4F899.998%ScottGas: N2〈8ppm; O2〈2ppm; H2O〈3ppm; Tetrafluoromethane〈1ppm; 酸性物〈0.5ppm
99.995%ScottGas: N2〈24ppm; O2〈6ppm; H2O〈10ppm; Tetrafluoromethane〈10ppm
99.9%ScottGas: N2〈750ppm; O2〈150ppm; H2O〈80ppm;
CH499.999%ScottGas: N2〈7ppm; O2〈0.5ppm; CO2〈1ppm; H2O〈1ppm; Propane〈0.5ppm; Ar〈0.5ppm
99.99%ScottGas: N2〈85ppm; O2〈0.5ppm; CO2〈1ppm; H2O〈1ppm; 丙烷〈1ppm; Ar〈0.5ppm
NO99.9995%ScottGas: O2〈1ppm; CO2〈1ppm; THC〈1ppm; H2〈1ppm; H2O〈1ppm
99.6%
99.0%
H299.9996%Ar〈1.0; CO2〈0.5; N2O〈0.1; THC〈0.1; H2O〈0.2; O2〈0.5;CO〈1.0; N2〈1.0;
HBr99.998%CH4〈5.0; CO2〈5.0; N〈2.0; CO〈1.0; H2O〈1.0; O2+Ar〈2.0
99.8%
HCl〉99.999CH4〈1.0; CO〈1.0; CO2〈2.0; Fe〈0.5; H2O〈1.0; N2〈2.0;O2+Ar〈1.0; 其它金属〈1.0
99.997CH4〈2.0; CO〈1.0; CO2〈5.0; H2O〈2.0; N2〈10.0; O2+Ar〈4.0
NF399.99%ScottGas: Tefluoromethane〈50ppm; N2〈2ppm; O2〈2.5ppm; CO2〈2ppm; H2O〈0.25ppm; Hydrogen Fluoride〈1.5%; Sulfur Hexafluoride〈20ppm; NO〈3ppm
〉99.9%CF4〈700; H2O〈1; O2+Ar〈50; CO〈10; N2〈50; SF6〈50;CO2〈10; N2O〈10; 总F〈0.3
99.5%CF4〈1500; H2O〈1; O2+Ar〈700; CO〈10; N2〈50; SF6〈50;CO2〈25; N2O〈25; 总F〈0.3
HF99.9%
N299.9996%THC〈0.5; H2〈0.1; O2〈1.0; CO〈1.0; H2O〈0.5; CO2〈0.5; N2O〈0.1