Graded-Density Filter Technology
The Planargard filter relies on a graded-density depth filter design that enables it to retain defectcausing agglomerates in each of its four layers. This design provides excellent retention of agglomerates while allowing desired slurry particles to reach the surface of the wafer. Because particles are retained throughout the filter matrix rather than on a single surface, the potential for premature filter “plugging” is greatly reduced.
Performance
Planargard filters remove only those particles that are disruptive to the CMP process, not all particles. The particle size distribution of the desired slurry particles does not change after filtration. As a result, consistent slurry is delivered to your process.
Filter Selection
Mykrolis offers Planargard filter options to match your application filtration objectives. For example to minimize wafer defects when polishing a polysilicon layer, a tight structure (i.e., CMP5) is recommended. If filter life is a priority, a more open structure (i.e.,CM13) may be used. Mykrolis’s worldwide technical support team stands ready to support you with product recommendations and evaluation assistance.
The Effect of Filtration on Working Particles
Results of tests conducted by Mykrolis demonstrate that Planargard cartridges do not affect the particle size distribution of working particles. Our testing also shows that filters tighter than CMP1 can remove desirable working particles, causing premature plugging and reduced removal rates.
上海微滤净化技术有限公司净化技术包括微孔过滤技术、超滤(错流)技术,纳米过滤技术以及反渗透技术,同时作为全球电子行业最著名过滤器公司Mykrolis(Millipore) 华东地区总代理,本着为客户提供”全流程过滤解决方案”的服务理念,专业从事于过滤及分离技术,开发和优化满足客户需要的各种过滤系统。工程及应用人员仔细考虑应用需求,选择合理的设计、工艺参数、组件及自动化程度,定向为用户提供高质量、长寿命和性能可靠的产品,以最大限度地降低用户的使用成本。我们提供各类液体及气体过滤系统及器材。