标题先进光学表面测量仪——陡峭斜面的3D表面测量

Surfaces with steep flanksvarying reflective properties are usually not measurable with conventional surface measurement techniques, even though there is an ongoing miniaturization of componentsrising demand for automation in industry. A solution can be provided by “Focus Variation”, a new optical measurement technique that allows the robust measurement of complex surfaces with vertical resolutions up to 10 nm. In addition to topographic data, true colour information that is perfectly registered to the
height data is obtained. The optical 3D measurement device & ldquo; InfiniteFocus” is based on this new technologyprovides a significant improvement in quality assurance. Allowing surface measurements in the micronano range as well as relatively large components, the Instrument can be used in the labas a measurement tool during production